The undulations of surface micro-nano structures can be manifested as irregularities in interference fringes during white light interferometry.

    The white light interference fringe patterns shown in this article use objective lenses including Linnik objective, Mirau objective, and Michelson objective, all of which were designed and developed by us.

White light interferometry detection of lens surface

White light interferometry detection of grating ruler

White light interferometry detection of steel ruler with large field of view

White light interferometry detection of microelectronic surface coating

Michelson interferometry detection of planar optical components

White light interferometry detection of chip surface

White light interferometry detection of metal mirror coating

White light interferometry detection of lapped and polished surface

White light interferometry detection of lapped and polished metal lens

White light interferometry detection of worn lens surface

White light interferometry detection of surface scratches

White light interferometry detection of surface lapping and polishing quality

White light interferometry detection of multi-rule plate

White light interferometry detection of scratched surface

White light interferometry detection of machined surface

White light interferometry detection of etched surface