Fringes

50X Mirau interference objective wafer inspection image

50X Mirau interference objective captured 1

White light interferogram of wafer surface captured by 50X Mirau objective

50X Mirau interference objective captured 2

White light interferogram of wafer surface captured by 50X Mirau objective

50X Mirau interference objective captured 3

White light interferogram of wafer surface captured by 50X Mirau objective

50X Mirau interference objective captured 5

White light interferogram of wafer surface captured by 50X Mirau objective

50X Mirau interference objective captured 6

White light interferogram of optical lens surface captured by 50X Mirau objective

50X Mirau interference objective captured 8

White light interferogram of wafer surface captured by 50X Mirau objective



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