Equipment Name: White Light Interferometry System Development Platform

Model No.: SHAPE3D-PT

Application Areas:

  1. White Light Interferometry Inspection

  2. White Light Interferometry Instrument Development

  3. Algorithm Research Platform for White Light Interferometry System

Magnification:

  10X (Standard Configuration)

  20X (Optional)

  50X (Optional)

Imaging Tube Lens:

  1X (Standard Configuration)

  0.5X (Optional)

Industrial Camera: Standard Configuration 1.3 Megapixel Monochrome Camera

Vertical Adjustment Range: 50mm Coarse Adjustment + 10mm Fine Adjustment

Tilt Adjustment: ±5°

Light Source: LEB White Light Source + Filter

Piezoelectric Ceramic: Standard Travel 200μm, Optional 100μm

Software: SHAPE3D White Light Interferometry Inspection Software (Optional)