Interferometric

Large Field of View White Light Interference Optical Integration

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Effect with Mirau objective

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Effect with Mirau objective and piezoelectric ceramics

Product Model:WLI

Product Features:

1. Compact size, large field of view optical design

2. Integrates all units of white light interference imaging

3. High imaging quality, excellent interference quality

4. Domestically produced interference objective

5. Minimum detectable surface reflectivity 0.5%

6. Easily integrable into other inspection modules

Technical Specifications:

        1. Imaging tube

Structure: Large field of view, short structure coaxial light

2. Objective

Standard configuration: 10X Mirau interference objective

Optional: 5X Linnik, 5X FMirau, 5X Mirau, 10X Linnik, 20X Mirau

       3. Light source: LED white light source, central wavelength 580nm

4. Sample under test: Minimum surface reflectivity greater than 0.5%

Application Cases:

55

66

14


26

27

25

Category:Interferometric

Keywords:

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