Name:White Light Interference Experimental Setup

Model:WLI-TILT

Instrument Introduction:

    The WLI-TILT white light interference experimental setup is suitable for research, teaching, and industrial production inspection of product surface roughness, micro-steps, and surface flatness. It can also be used to detect film thickness, surface damage, and defect analysis.

Instrument Features:

   1. Small size, compact structure, high integration

   2. Uses domestically manufactured interference objective lens

   3. Larger vertical travel distance, can accommodate larger sample inspection

   4. Instrument equipped with tilt-adjustable measurement head

   5. Can inspect roughness, surface micro/nano scratch depth, and film thickness

   6. Software can simulate 3D contour of the inspection area

   7. Phase shifter can be easily added to enable white light interference inspection

Instrument Specifications

1. Objective lens: 10X Mirau interference objective lens.

2. Light source: LED white light source, adjustable brightness, central wavelength 560nm.

3. Focus mount: Coaxial dual-speed focusing, 50mm travel.

4. Work stage: Stage size 180X155mm, X travel 75mm, Y travel 55mm, 360° rotation.

5. Measurement head adjustment: Left/right swing ±5°, vertical tilt range 0~5°.

6. Camera: Color camera or monochrome camera optional.

7. Software: CRWLI micro-nano contour inspection software, SHAPE3D optical 3D contour inspection software both optional