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Case study of micro-nano profile inspection software

    Micro-nano Profile Detection System Case study of surface roughness and scratch detection:

    Objectives used: 5X Linnik objective, 10X Linnik objective,10X Mirau objective, 20X Mirau objective.

    Software: CRWLI Micro-nano Profile Detection Software

  
Ra0.07um multi-rule plate detection 

  
Surface scratch detection

  
0.8um single-rule plate detection       

  
Ra0.42um multi-rule plate detection         

Capture

Ra0.05um rough surface

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