When inspecting products with surface cracks, micro-nano indentations, or protrusions, in some cases, even under a microscope, they cannot be easily observed. Using a large-field-of-view white light interferometry inspection system, we have obtained excellent defect profile images when detecting such defects.

    I. Detecting micro-nano protrusions on chip surface

Original image

Inspection area

    As shown in the inspection area, it is very difficult to identify a square protrusion, which cannot even be recognized under a microscope.

White light interferometry inspection image

    As shown, using the large-field-of-view white light interferometry inspection system, under interference conditions, the square profile that was difficult to distinguish is clearly presented.
    II. Identification of micro-nano topography change areas after edge collision of optical components

Original image

Inspection area

    As shown in the figure, the inspection area in the original image indicates that after the edge of an optical processing component is subjected to external force, a crack resembling an elliptical area is observed under a microscope. The cracked area can be seen from the microscopic image, but if the crack were smaller, it would be difficult to observe even under a microscope.

White light interferometry inspection image

    As shown, when observed under white light interference conditions, the interference fringe direction and thickness in the damaged area are significantly different from those in the surrounding area. This indicates that after being damaged by external force, the micro-nano scale topography of the area has been severely altered.

    III. Product crack profile identification

Original image

Inspection area

    As shown, the inspection area in the original image observed under a microscope shows a thick crack, and the outer contour of the inspection area is close in color to the surrounding background. Although the outer contour can be observed, it is not ideally clear. Moreover, the microscopic quality of the inspected area surface is also not easy to observe.

White light interferometry inspection image 1

White light interferometry inspection image 2

White light interferometry inspection image 3

    As shown, when inspecting under white light interference conditions, using different orders, the crack profile and the profile of the inspected area are very clear, and the microscopic details of the surface topography of the inspected area are also distinctly presented.