This time, the CR-100V white light interferometry system is used to detect the roughness comparison block.

Roughness comparison block

     According to the test results of the roughness instrument (unit: um): Ra=0.1. Because there are many scratches on the surface, it is judged that the Ra=0.1 error is relatively large.

CR-100V white light interferometry system

5X white light interference objective used

     During detection, two positions were selected as test areas.

First position test result

      First position test result (unit: um): The roughness of the three-dimensional topography is represented by Sa. This is different from the evaluation method of the linear direction test result of the roughness instrument.

      Sa=0.09995,

Second position test result

      Second position test result (unit: um): The roughness of the three-dimensional topography is represented by Sa. This is different from the evaluation method of the linear direction test result of the roughness instrument.

      Sa=0.10802,   

     Result: the two measured results are 0.09995um and 0.10802um. The roughness comparison block is marked as 0.1um. Therefore, the test results can be judged as accurate.