Name: 5X Michelson Interference Objective

Application Field:

    5X Michelson Interference Objective, like Mirau and Linnik objectives, is an essential optical component for white light interference inspection.

Features:

    1. Domestic interference objective

    2. No central obstruction

    4. Can measure samples with surface reflectivity as low as 0.5%

    5. Detachable extension tube, compatible with conventional microscopes

Structure: Michelson white light interference system design

Numerical Aperture: 0.15

Working Distance: 8mm

Parfocal Distance: 48.5mm

Field of View:

  1.2X1.5mm (f200+1/2CCD)

  2.8X2.1mm custom (f200+0.5X+1/2CCD)

Interface: RMS(m20.32)

Name: 5X Michelson Obj

Application Field:

  The 5X Michelson obj, along with Mirau and Linnik objective lenses, serves as an essential optical component for white light interference detection.

Features:

 NA: 0.15

 WD: 8mm

 Parfocal Distance: 48.5mm

FOV:

  2×1.5mm (f200 + 1/2CCD)

  8×2.1mm (customized, f200 + 0.5X + 1/2CCD)

Interface: RMS (m20.32)

Inspection Cases: