2X Michelson Objective

Name    :MichelsonWhite Light Interference Objective

Application    :

   Michelson white light interference objective is mainly used for non-contact measurement of micro/nano-level 3D surface topography, inspecting chip surface profiles or coating thickness in the semiconductor industry, ultra-smooth surface roughness in industrial manufacturing, micro/nano step heights, MEMS topography, etc.

Features   :

  1.Large field of view, high resolution, clear image

  2.Long working distance

  3.Compact structure

  4.360-degree rotatable

Parameters   :

  1.Lens design: Michelson interference structure design

  2.Magnification: 2X

  3.Focal length: 100mm

  4.Numerical aperture: 0.055

  5.Working distance: 14mm

  6.Parfocal distance: 120mm

  7.Field of view:

  a.Mounted on metallurgical microscope

  (1) With 0.5X auxiliary lens, field of view: 6X4.5mm

  (2) With 1X auxiliary lens, field of view: 3X2.2mm

  b.Visual observation, eyepiece 10X/23mm

  Field of view: φ11.5mm

  8.Mount size: M26X0.706

Inspection results: (Inspection Case 1)

Michelson Objective

Michelson Objective

Michelson Objective

Michelson Objective

Michelson Objective