Name: Micro/Nano Profile Detection System

Other name: Interference Microscopy Detection System

Model: CRWL1-10/20

Instrument Introduction
  The CRWLI series Micro/Nano Profile Detection System is suitable for research, teaching, and industrial production for measuring surface roughness, micro steps, and flatness of products. It can also be used for measuring film thickness, surface damage, and defect analysis.
Instrument Features
  1. Small size, compact structure
  2. Easy to operate, user-friendly
  3. Video detection, facilitating later image calculation
  4. Uses domestically produced interferometric objectives

  5. Can measure roughness parameters Ra, Rz, Rp, Rv, PV, Rms

  6. Can measure maximum profile height, minimum height, and average height

  7. Can measure the depth of micro/nano surface scratches
  8. Can measure physical thickness and optical thickness of transparent films

  9. Can measure surface roughness of steel balls

  10. Built-in refractive index database of common coating materials for easy access
  11. Can simulate 3D profile of the measured area

Instrument Specifications
  1.Objectives: Mirau interferometric objective, Linnik interferometric objective, Michelson interferometric objective
  2. Light source: LED white light, adjustable brightness, central wavelength 560nm
  3. Focusing mount: coaxial dual-speed focusing, 50mm travel
  4. Stage: (1) X travel +/-7.5mm, Y travel +/-7.5mm

  5. Camera: 3 megapixels
  6. Software: CRWLI Micro/Nano Profile Detection Software    

Software Description

    CRWLI software is used for micro/nano surface profile analysis and detection. Import a single white light interferometric fringe image into the software, perform relevant operations, and finally obtain relevant parameters, as well as simulate the 3D profile of the surface.

  Compared to using a white light interferometer for full 3D surface topography detection, this software is a cost-effective solution for cross-sectional profile detection and analysis at a single surface location.

Software Applications

  1. Micro/nano surface damage depth detection

  2. Micro/nano step detection

  3. Multi-groove plate roughness, groove profile and depth detection

  4. Micro/nano surface roughness detection: Ra, Rz, Rp, Rv, PV, Rms.

  5. Coated film profile detection

  7. Steel ball surface roughness detection

Software Features

  1. The software's unique algorithm makes surface profile recognition more accurate

  2. Only a white light interferometric fringe image is needed to detect surface profile related parameters

  3. Can measure surface roughness parameters, micro/nano steps, and multiple parameters of surface damage depth

  4. Can simulate the detected surface profile results into a 3D topography for analysis

  5. Automatic or manual calculation of 0.5λ

  6. Measurement accuracy better than 10nm

  7. Test report output in Word format

  8. Can measure samples with roughness Ra less than 2μm, step or scratch depth not exceeding 4μm

Test Report:

Micro/Nano Profile Detection System (Interference Microscopy Inspection System).pdf

Micro Nano Profile Detection System (English Version)

Test Cases:

   1.Roughness detection of inner spherical surface in machining

   2.Steel ball surface roughness detection

   3.Micro/Nano Profile Detection System for measuring lapping/polishing surface roughness

   4.Micro/Nano step detection

   5.Surface scratch depth detection

   6.Multi-groove plate detection and metrology result comparison