Using the Micro-Nano Profile Measurement System to measure the surface roughness of several ground and polished sample blocks.
Normally, a roughness tester can be used for measurement, but under special requirements, only non-contact methods are feasible. The Micro-Nano Profile Measurement System can measure the surface roughness of ground and polished samples. The nominal Ra values of the tested sample blocks are 0.2um, 0.1um, and 0.05um.
1. Measurement of Ra0.2um sample block:

Interference fringe pattern

Software measurement interface

Measurement report
Measurement result: For the ground and polished sample block with nominal Ra 0.2um, the measured roughness is Ra = 0.1933um.
2. Measurement of Ra0.1um sample block:

Interference fringes

Software interface

Measurement report
Measurement result: For the ground and polished sample block with nominal Ra 0.1um, the measured roughness is Ra = 0.1074um.
3. Measurement of Ra0.05um sample block:

Interference fringes

Software interface

Measurement report
Measurement result: For the ground and polished sample block with nominal Ra 0.05um, the measured roughness is Ra = 0.05027um.