The coating on the surface of microelectronic devices has special functions, and different coatings have different functions, such as: conductive, insulating, waterproof, electromagnetic shielding, etc.

    This time, a special conductive coating on the surface of a microelectronic device was detected, similar to a wire. Its specific function is still unclear. According to the user, the actual performance data of this coating can be measured using professional instruments. However, due to its Specificity, it is necessary to establish a standard quality control plan by combining the actual measurement results with the surface profile of the coating, and determine the influence of the coating's surface structure on the final product effect.

    After analysis, the surface coating can be inspected by white light interferometry. White light interferometry is suitable for this type of surface morphology inspection, and has advantages in thickness inspection at the micron and nanometer levels.

    Through inspection, a three-dimensional color topography of the surface is obtained, where the red part is the coating. The inspection result also shows that the thickness of the coating is 30.002um.

    Inspection instrument: White light interferometer

    Model: CR-100V

    Magnification: 100X

    Objective lens: 10x/0.25 Linnik interferometric objective

    Pixels: 3 million

    Software: White light interferometry analysis software

    Figure 1: White light interferometry image of the coating surface obtained by white light interferometry

    Figure 2: The running interface of the white light interferometry analysis software

    Figure 3: Inspection report