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Interferometry
Detection of deep steps with O'STAROPT interference objective
For the detection of high-precision 3D topography on deep stepped surfaces of products, the Linnik interference lens is a good choice. Taking the O'STAROPT LINNIK 10X interference objective as an example, it has a working distance of 17mm, which can meet the white light interference detection of stepped surfaces up to 17mm deep.
Typically, when using a Mirau interference objective, the maximum working distance is less than 10mm. For stepped surfaces exceeding this working distance, detection is impossible without damaging the part.
Here we use the O'STAROPT LINNIK 10X interference objective to detect two cases, where the depth of the stepped surfaces exceeds 15mm.
Case 1:
Detection of the external stepped surface of a machined part
The position indicated by the arrow (bright spot) is the stepped surface under detection
Interference fringe pattern of the stepped surface
Case 2:
Detection of the internal stepped surface of a machined part
Detection of the internal stepped surface of a machined part
Interference fringe pattern of the stepped surface
Xi'an Enke Weina Optoelectronic Technology Co., Ltd. offers products in three types of interference objectives: Linnik, Mirau, and Michelson, and has certain customization capabilities for various non-standard white light interference optical paths.
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